The Micro Gas Mass Flow Meter is a compact gas measurement instrument based on MEMS thermal sensing technology.
It directly measures gas mass flow through heat transfer, providing fast response, stable measurement, and reliable performance without additional temperature or pressure compensation under specified conditions.
With its compact design, multiple signal outputs, and communication capabilities, it is ideal for industrial equipment, analytical instruments, medical devices, fuel cell systems, and OEM applications.
MEMS Thermal Sensing：High-sensitivity MEMS technology enables precise gas mass flow measurement in a compact sensor design.
Fast Response：Low thermal mass allows rapid detection of changing gas flow conditions.
Wide Measuring Range：Supports a wide flow range for different low-flow gas measurement requirements.
Direct Mass Flow Measurement：Measures gas mass flow based on thermal heat transfer with no additional compensation required under specified conditions.
Compact Design：Small size and lightweight construction simplify installation in equipment with limited space.
Flexible Integration：Multiple output and communication options support connection to PLCs, controllers, and monitoring systems.
Rotatable LCD：Clear local indication with a 180° rotatable display for flexible installation.
The flow meter operates on the thermal mass flow principle.
A MEMS chip integrates a micro-heater and temperature sensing elements to establish a stable thermal field. When gas flows through the sensor, it changes the upstream and downstream temperature distribution.
The MEMS sensing elements detect this temperature difference and convert it into an electrical signal. The transmitter then processes and linearizes the signal to determine the instantaneous mass flow rate and totalized flow.
The Micro Gas Mass Flow Meter is designed for precise gas measurement and equipment integration across a wide range of applications.
Analytical Instruments
Gas analyzers, laboratory instruments, sampling systems, and test equipment.
Medical Equipment
Gas monitoring and flow measurement in medical and laboratory devices.
Fuel Cell & Energy
Hydrogen, air, and process gas measurement for fuel cell and energy systems.
Industrial OEM Equipment
Integration into automated machinery, gas supply modules, and process equipment.
Chemical & Process
Clean gas monitoring, dosing, and gas distribution applications.
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Compact Solution for Precise Gas Flow Measurement
Combining MEMS sensing, fast response, compact design, and flexible system integration, the Micro Gas Mass Flow Meter provides reliable gas mass flow measurement for industrial and OEM applications.
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Provide your gas type, flow range, pressure, temperature, and required output signal to get the recommended configuration.
